Beta Squared Lithography Inc. Micralign Projection Mask Aligner

Description

This MA Tool was used in an R&D Lab environment and has low hours on it. This is a very nice tool and the buyer will be getting a "like new" tool at a used tool price.  No warranty implied or given with this tool.  This is an "as is, where is" purchase.  Tool is set on a floater base pallet already and all the buyer has to do is get a top made for the crate.  I paid for the floater base pallet and barrier bag that sits next to the tool until ready to ship.  Again, you are responsible for the crate top, and the labor to put that crate top on and seal the barrier bag over this tool for shipping.  Buyer responsible for shipping, crate top and labor for barrier bag and for putting crate top onto the pallet. A must see piece of equipment. Buying a "like new" piece of equipment with low hours for a used low price!!  Original invoice price was 5K+!
This is s/n C4471R started life as a 100 mm (4” tool) and remains as such, though it was customized to be able to also run 2” wafers that were carried on 100 mm carriers.  This customization included Beta Square's machine control system, OS2000. Unit refurbished in 2011 and then hardly used after refurbishment. OEM willing to work with buyers of this tool and install and even upgrade this unit to 6" if need at a price around 0K.  You will still be saving money since the new units cost anywhere from 0K to million dollars.  I have spoke to the President of Beta Square and they are fully support this tool!
To get ready for shipping this unit it will cost around K. Beta Squared will come out to my site and install all the shipping brackets then crate it with their engineered crate for shipping their equipment. If you need installation and start up with training, this cost usually is around K. No hidden cost here with this unit. We spell all the cost out right here. So if purchased, you will get this tool with start up and delivery for around 0K give or take a little. You still may negotiate with Beta Squared on your behalf regarding installation, getting this unit ready for shipping, like crating cost and cost for adding the shipping brackets.
To be more specific on the type of Mask Aligner, it is a Projection Mask Aligner as contrasted to a Proximity/Contact Aligner.  Because of this it has both better alignment specs, depth of focus, and overlay specs.  It allows adjustments for mag in either direction independently as well as adjustments to minimize astigmatism and other distortions.   And also because of this, it is generally more expensive than a Proximity/Contact Aligner because it was meant for a production environment.
This piece was refurbished to these specs and has The OS2000 software package.  Beta Squared purchased Perkin Elmer's line on this product on these tools. This system has a 600 style prealigner.  Customers prefer the 600 style to the 700 style because it is easier to keep calibrated/aligned.
This tool will expose the entire wafer.
If you are thinking this is a ‘Full Exposure’ type of tool, it is NOT!
A ‘Full Exposure’ tool exposes the entire wafer at once, with light coming in through a classic lens and as big as the wafer.  The problem with these types of system is that it’s hard to get good uniformity across the wafer, and also control distortion over the entire wafer.
Instead, the Micralign is a ‘Scanning’ exposure tool, where an arc of light that’s about 4 mm tall scans over the entire wafer in synchronicity with the mask to fully expose the wafer.
This type of exposing system enables better control of uniformity and distortion, especially Anisotropic mags and skews.
And by the way, latest ASML Twin Scan tool, arguably the most sophisticated tool out there, is also a Scanning type of tool (like this one) and is essentially a direct descendant of the Micralign, where scanning lithography was born.
-Automated Uniformity, is NOT Present
-Helium Regulator ...Has an automatic Helium Regulator, but it is the BSL variety, NOT the PE/SVGL/ASML variety.  It is easier to operate with the BSL regulator.
All Manuals are with this tool. SPECS:
Resolution: 1.25um lines spaces, UV-4(340-440nm)
Throughput: 120  wafers per hour, 125/100mm systems and 100 wafers per hour, 150mm systems
Depth of Focus:+-6um for 1.5um lines and spaces
Focus Stability:+-2.0um over 6 days
Focus Range:+-200um    +-450um w/extended bellows chuck
Partial Coherence: Variable, 0.37 to 0.86
Numerical Aperture: .167
Uniformity of Illumi